| Jahr Year | Titel/Autor:in Title/Author | Publikationstyp Publication Type |
|---|---|---|
| 2023 | Atomically Thin Metal-Dielectric Heterostructures by Atomic Layer Deposition Paul, Pallabi; Schmitt, Paul; Sigurjónsdóttir, Vilborg; Hanemann, Kevin; Felde, Nadja; Schröder, Sven; Otto, Felix; Gruenewald, Marco; Fritz, Torsten; Roddatis, Vladimir; Tünnermann, Andreas; Szeghalmi, Adriana |
Zeitschriftenaufsatz Journal Article |
| 2023 | Heterostructure Films of SiO2 and HfO2 for High-Power Laser Optics Prepared by Plasma-Enhanced Atomic Layer Deposition Alam, Shawon; Paul, Pallabi; Beladiya, Vivek; Schmitt, Paul; Stenzel, Olaf; Trost, Marcus; Wilbrandt, Steffen; Mühlig, Christian; Schröder, Sven; Matthäus, Gabor; Nolte, Stefan; Riese, Sebastian; Otto, Felix; Fritz, Torsten; Gottwald, Alexander; Szeghalmi, Adriana |
Zeitschriftenaufsatz Journal Article |
| 2023 | Enhanced surface second harmonic generation in nanolaminates Abtahi, Fatemeh; Paul, Pallabi; Beer, Sebastian; Kuppadakkath, Athira; Pakhomov, Anton; Szeghalmi, Adriana; Nolte, Stefan; Setzpfandt, Frank; Eilenberger, Falk |
Zeitschriftenaufsatz Journal Article |
| 2023 | Conformal antireflection coatings for optical dome covers by atomic layer deposition Gerold, Kristin; Beladiya, Vivek; Paul, Pallabi; Kästner, David; Saarniheimo, Mikael; Niiranen, Kalle; Schröder, Sven; Szeghalmi, Adriana |
Zeitschriftenaufsatz Journal Article |
| 2023 | Linear and Nonlinear Optical Properties of Iridium Nanoparticles Grown via Atomic Layer Deposition Schmitt, Paul; Paul, Pallabi; Li, Weiwei; Wang, Zilong; David, Christin; Daryakar, Navid; Hanemann, Kevin; Felde, Nadja; Munser, Anne-Sophie; Kling, Matthias F.; Schröder, Sven; Tünnermann, Andreas; Szeghalmi, Adriana |
Zeitschriftenaufsatz Journal Article |
| 2022 | Plasma-Enhanced Atomic Layer Deposition of HfO2 with Substrate Biasing: Thin Films for High-Reflective Mirrors Beladiya, Vivek; Faraz, T.; Schmitt, Paul; Munser, Anne-Sophie; Schröder, Sven; Riese, S.; Mühlig, C.; Schachtler, D.; Steger, F.; Botha, R.; Otto, F.; Fritz, T.; Helvoirt, C. van; Kessels, W.M.M.; Gargouri, H.; Szeghalmi, Adriana |
Zeitschriftenaufsatz Journal Article |
| 2022 | Conformal antireflection coatings on large optical cubes Gerold, Kristin; Baladiya, Vivek; Paul, Pallabi; Kästner, David; Saarniheimo, Mikael; Niiranen, Kalle; Schröder, Sven; Szeghalmi, Adriana |
Konferenzbeitrag Conference Paper |
| 2022 | Optical properties of black silicon structures ALD-coated with Al2O3 Schmelz, David; Gerold, Kristin; Käsebier, Thomas; Sergeev, Natali; Szeghalmi, Adriana; Zeitner, Uwe Detlef |
Zeitschriftenaufsatz Journal Article |
| 2022 | Optical, structural, and functional properties of highly reflective and stable iridium mirror coatings for infrared applications Schmitt, Paul; Felde, Nadja; Döhring, T.; Stollenwerk, M.; Uschmann, I.; Hanemann, Kevin; Siegler, Marie; Klemm, Georg; Gratzke, Nancy; Tünnermann, Andreas; Schwinde, Stefan; Schröder, Sven; Szeghalmi, Adriana |
Zeitschriftenaufsatz Journal Article |
| 2022 | Environmentally stable iridium mirror coatings for the infrared spectral range Döhring, Thorsten; Stollenwerk, Manfred; Schmitt, Paul; Szeghalmi, Adriana |
Konferenzbeitrag Conference Paper |
| 2021 | Conformal antireflection coating on polycarbonate domes Paul, P.; Beladiya, V.; Kästner, D.; Schulz, U.; Burkhardt, M.; Szeghalmi, A.V. |
Konferenzbeitrag Conference Paper |
| 2021 | Optical bandgap control in Al2O3/TiO2 heterostructures by plasma enhanced atomic layer deposition: Toward quantizing structures and tailored binary oxides Paul, P.; Hafiz, M.G.; Schmitt, P.; Patzig, C.; Otto, F.; Fritz, T.; Tünnermann, A.; Szeghalmi, A. |
Zeitschriftenaufsatz Journal Article |
| 2021 | Structural, optical, and mechanical properties of TiO2 nanolaminates Ghazaryan, L.; Handa, S.; Schmitt, P.; Beladiya, V.; Roddatis, V.; Tünnermann, A.; Szeghalmi, A. |
Zeitschriftenaufsatz Journal Article |
| 2021 | Influence of substrate materials on nucleation and properties of iridium thin films grown by ALD Schmitt, P.; Beladiya, V.; Felde, N.; Paul, P.; Otto, F.; Fritz, T.; Tünnermann, A.; Szeghalmi, A. |
Zeitschriftenaufsatz Journal Article |
| 2021 | Influence of temperature and plasma parameters on the properties of PEALD HfO2 Lapteva, M.; Beladiya, V.; Riese, S.; Hanke, P.; Otto, F.; Fritz, T.; Schmitt, P.; Stenzel, O.; Tünnermann, A.; Szeghalmi, A. |
Zeitschriftenaufsatz Journal Article |
| 2020 | Antireflection coating on PMMA substrates by atomic layer deposition Paul, P.; Pfeiffer, K.; Szeghalmi, A. |
Zeitschriftenaufsatz Journal Article |
| 2020 | Effect of an electric field during the deposition of silicon dioxide thin films by plasma enhanced atomic layer deposition: An experimental and computational study Beladiya, V.; Becker, M.; Faraz, T.; Kessels, W.M.M.; Schenk, P.; Otto, F.; Fritz, T.; Gruenewald, M.; Helbing, C.; Jandt, K.D.; Tünnermann, A.; Sierka, M.; Szeghalmi, A. |
Zeitschriftenaufsatz Journal Article |
| 2020 | Tuneable Optical Properties in Al2O3/TiO2 Nanocomposites Fabricated by Atomic Layer Deposition (ALD) Paul, P.; Hafiz, G.; Tünnermann, A.; Szeghalmi, A. |
Konferenzbeitrag Conference Paper |
| 2019 | Design and fabrication of single, smooth and broadband chirped mirrors with a top nano-porous layer Ma, P.; Szeghalmi, A.; Schulz, U.; Rickelt, F.; Beladiya, V.; Zimmermann, P.; Li, L. |
Konferenzbeitrag Conference Paper |
| 2019 | Wide-Angle Broadband Antireflection Coatings Prepared by Atomic Layer Deposition Pfeiffer, K.; Ghazaryan, L.; Schulz, U.; Szeghalmi, A. |
Zeitschriftenaufsatz Journal Article |
| 2019 | On the Properties of Nanoporous SiO2 Films for Single Layer Antireflection Coating Ghazaryan, L.; Sekman, Y.; Schröder, S.; Mühlig, C.; Stevanovic, I.; Botha, R.; Aghaee, M.; Creatore, M.; Tünnermann, A.; Szeghalmi, A. |
Zeitschriftenaufsatz Journal Article |
| 2019 | Optical Coatings with Atomic Precision Szeghalmi, A. |
Zeitschriftenaufsatz Journal Article |
| 2019 | Antireflection coating with consistent near-neutral color on complex-shaped substrates prepared by ALD Pfeiffer, K.; Dewald, W.; Szeghalmi, A. |
Zeitschriftenaufsatz Journal Article |
| 2018 | Laser-induced damage threshold of nanoporous single-layer ALD antireflective coatings Gischkat, T.; Botha, R.; Stevanovic, I.; Szeghalmi, A.; Ghazaryan, L.; Bächli, A. |
Konferenzbeitrag Conference Paper |
| 2018 | Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies Faraz, T.; Knoops, H.C.M.; Verheijen, M.A.; Helvoirt, C.A.A. van; Karwal, S.; Sharma, A.; Beladiya, V.; Szeghalmi, A.; Hausmann, D.M.; Henri, J.; Creatore, M.; Kessels, W.M.M. |
Zeitschriftenaufsatz Journal Article |
| 2018 | Growth of Atomic Layer Deposited Ruthenium and its Optical Properties at Short Wavelengths Using Ru(EtCp)2 and Oxygen Müller, R.; Ghazaryan, L.; Schenk, P.; Wolleb, S.; Beladiya, V.; Otto, F.; Kaiser, N.; Tünnermann, A.; Fritz, T.; Szeghalmi, A. |
Zeitschriftenaufsatz Journal Article |
| 2018 | Controlling mechanical, structural, and optical properties of Al2O3 thin films deposited by plasma-enhanced atomic layer deposition with substrate biasing Beladiya, V.; Faraz, T.; Kessels, W.M.M.; Tünnermann, A.; Szeghalmi, A. |
Konferenzbeitrag Conference Paper |
| 2018 | Reproducibility and stability of nanoporous SiO2 thin film coatings Ghazaryan, L.; Szeghalmi, A. |
Konferenzbeitrag Conference Paper |
| 2017 | Ta2O5/ Al2O3/ SiO2 - antireflective coating for non-planar optical surfaces by atomic layer deposition Pfeiffer, K.; Schulz, U.; Tünnermann, A.; Szeghalmi, A. |
Konferenzbeitrag Conference Paper |
| 2017 | Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications Shestaeva, S.; Bingel, A.; Munzert, P.; Ghazaryan, L.; Patzig, C.; Tünnermann, A.; Szeghalmi, A. |
Zeitschriftenaufsatz Journal Article |
| 2017 | Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition Pfeiffer, K.; Schulz, U.; Tünnermann, A.; Szeghalmi, A. |
Zeitschriftenaufsatz Journal Article |
| 2016 | Nanoporous SiO2 thin films made by atomic layer deposition and atomic etching Ghazaryan, L.; Kley, E.-B.; Tünnermann, A.; Szeghalmi, A. |
Zeitschriftenaufsatz Journal Article |
| 2016 | Blistering during the atomic layer deposition of iridium Genevee, P.; Ahiavi, E.; Janunts, N.; Pertsch, T.; Oliva, M.; Kley, E.-B.; Szeghalmi, A. |
Zeitschriftenaufsatz Journal Article |
| 2016 | Comparative study of ALD SiO2 thin films for optical applications Pfeiffer, K.; Shestaeva, S.; Bingel, A.; Munzert, P.; Ghazaryan, L.; Helvoirt, C. van; Kessels, W.M.M.; Sanli, U.T.; Grevent, C.; Schütz, G.; Putkonen, M.; Buchanan, I.; Jensen, L.; Ristau, D.; Tünnermann, A.; Szeghalmi, A. |
Zeitschriftenaufsatz Journal Article |
| 2015 | Influence of the oxygen plasma parameters on the atomic layer deposition of titanium dioxide Ratzsch, Stephan; Kley, Ernst-Bernhard; Tünnermann, Andreas; Szeghalmi, Adriana |
Zeitschriftenaufsatz Journal Article |
| 2015 | High-efficiency embedded transmission grating made by atomic layer deposition Ratzsch, S.; Kley, E.-B.; Tünnermann, A.; Szeghalmi, A. |
Konferenzbeitrag Conference Paper |
| 2015 | Inhibition of Crystal Growth during Plasma Enhanced Atomic Layer Deposition by Applying BIAS Ratzsch, S.; Kley, E.-B.; Tünnermann, A.; Szeghalmi, A. |
Zeitschriftenaufsatz Journal Article |
| 2015 | Nanoporous SiO2 made by atomic layer deposition and atomic layer etching Ghazaryan, L.; Kley, E.-B.; Tünnermann, A.; Szeghalmi, A. |
Konferenzbeitrag Conference Paper |
| 2015 | Encapsulation process for diffraction gratings Ratzsch, Stephan; Kley, Ernst-Bernhard; Tünnermann, Andreas; Szeghalmi, Adriana |
Zeitschriftenaufsatz Journal Article |
| 2015 | Plasma-enhanced atomic layer deposition for antireflection coatings using SiO2 as low-refractive index material Pfeiffer, K.; Shestaeva, S.; Bingel, A.; Munzert, P.; Schulz, U.; Kaiser, N.; Tünnermann, A.; Szeghalmi, A. |
Konferenzbeitrag Conference Paper |
| 2013 | Stability and annealing of alucones and alucone alloys Ghazaryan, Lilit; Kley, Ernst-Bernhard; Tünnermann, Andreas; Szeghalmi, Adriana Viorica |
Zeitschriftenaufsatz Journal Article |
| 2011 | Atomic layer deposition of iridium thin films and their application in gold electrodeposition Szeghalmi, A.; Arnold, M.; Berger, A.; Schammelt, N.; Füchsel, K.; Knez, M.; Kley, E.-B.; Zahn, D.R.T.; Tünnermann, A. |
Konferenzbeitrag Conference Paper |
| 2011 | Iridium wire grid polarizer fabricated using atomic layer deposition Weber, T.; Kasebier, T.; Szeghalmi, A.; Knez, M.; Kley, E.B.; Tünnermann, A. |
Zeitschriftenaufsatz Journal Article |